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The MicroINSPECT™ wafer inspection system integrates more applications with ergonomic ease of operation. A small footprint, high speed, low cost per feature and serviceability contribute to its’ award winning CoO. |
Custom System Configurations :
- Integrate to any microscope or existing microscopes
- Confocal UV Optics
- Stepper or Hi-Speed DC Robots & Stages
- Hi–Accuracy Stage
- Mini Environment Enclosure>
- 50mm – 300mm Wafers
- 1 to 4 Cassette Towers
- Motorized Tilt Back w/ or w/out Integrated Flat/Notch Aligner
- Multi-Cassette Size Auto Recognition
- OCR
- Cassette BCR
- Laser Marker compatible
- 20” Hi Res Flat Panel Display
- Integrate EAGLEview™ Auto-Macro Inspection module
Easy Robot Setup - Detailed Diagnostics :
- Easy to use GUI service interface simplifies diagnostics and provides an automated robot each routine for each wafer exchange position.
- SITEview™ provides an easy upgrade path for existing LEP MAC 2000 based systems
SITEview™ applications include :
- Visual Inspection
- Defect Review
- OCR
- Sorting
- Second Optical Inspection
- Image Storage & Retrieval
- Overlay Measurement
- Laser Marking
- GEM/SECS II
- Host Communication – LAN
- UV Microscope Interface
