The MicroSORT wafer sorting system. High throughput with minimal wafer handling.

FEATURES :

SITEview™ is a True user-oriented software interface :

Single screen operations eliminate screen clutter
Multi-level password protection
User customizable screen appearance, buttons & functions
Recipes created on or offline are available to all systems via Host (LAN) connection
One software version for all systems & configurations for 50mm – 300mm wafers

OCR & Sorting :

Front or Backside scribe
500 Wafers/hr. – Map Cassette/OCR wafers
Inventory file stores wafer history by ID AND Slot, Lot log in / out time & date
Enables full sorting functions – Move, Compress, Randomize, Find, Align, Verify and Split Lot.
Virtual Tweezer mode allows operator to click on wafer icon to move wafers between cassettes or slots, OCR and swap wafer positions.

Multiple Wafer Size Recognition :

4,5,6 & 8 inch wafer cassettes can be placed on one platform without recalibration or retrofits. System automatically senses and makes appropriate recipes available.

LAN Interface :

Recipes are stored on a Host computer. If connection is lost, system will work from local drive and automatically switch to Host when connection is restored.

EAGLEview™ Compatible :

Can mount EAGLEview™ module onto system enabling high speed (21 sec/wfr) Auto Macro Defect finding during Sort function
Eliminates process steps, increases Macro inspection accuracy See EAGLEview™ brochure for more details

Service Friendly :

Front service access to all components
Robot is field repairable
>97% Uptime
Easy to use GUI service interface simplifies diagnostics and provides an automated robot teach routine for each wafer exchange position.