For 200mm wafer applications, the 8”x8” stage is the obvious choice. Its compact size and high performance can convert a routine microscope into a highly productive asset.

• 203mm X 203mm (8" X 8") travel range
• Low profile, ergonomic design
• 4mm recirculating ball leadscrew
• High resolution rotary encoder with 0.4µm resolution
• Hardened, ground crossed roller bearing guide ways
• 10µm accuracy over full range of travel
• Solid aluminum insert plate standard

The 8”x8” stage is available in a compact envelope version that can be mounted on most smaller microscopes that were originally designed for 150mm wafer applications.  With little compromise, the reduced envelope also makes inte­gration with loaders easier.  As a result of the compact envelope, the insert cutout is 193mm square.  This is identical to the 6”x6” stage and only provides transmit­ted light capability over the center 150mm of travel.

Built to exact standards, this stage has specifications that meet or exceed the requirements of routine semiconductor microscopy.  Compatible with reflected and transmitted light applications, the standard insert plate can accept a variety of options including motorized rotating vacuum wafer chuck, fixed vacuum chuck, glass plate and other custom holders.

Other features such as adjustable end-limits, anti-creep roller cages, fixed cable connecting and universal mounting make this stage an excellent choice for metrology and inspection applications.

• 8x8 stepper motor stage with compact travel envelope
• 8x8 DC servo motor stage with compact travel envelope
• 8x8 stepper motor stage
• 8x8 DC servo motor stage 

TechnicalSpecifications (Weight = 7.7 kg., Height = 33mm at object plane):

Specifications	Stepper Motor	DC Servo Motor
Max. Speed	120mm/sec.	250mm/sec.
Resolution	0.1 µm	0.4 µm
Repeatibility	2.0 µm	2.0 µm
Accuracy	10µm/200mm	10µm/200mm
Straightness	1µm/25mm	1µm/25mm
Flatness	1µm/25mm	1µm/25mm